1. Testing of Small-Scale Materials
|

|
Measurement of stresses and stress relaxation in thin films by laser-optical measurement of substrate curvature, as a function of temperature and in various atmospheres |

|
X-ray stress measurement in thin films and narrow lines, as a function of temperature |

|
Depth-sensing indentation ("nanoindentation") measurements coupled with atomic force microscopy for nm-scale contacts |

|
Micro-tensile testing machine for determining stress-strain curves of thin films on substrates, with X-ray stress measurement and laser-optical strain measurement |

|
Damping mesurements of micro-beams |

|
Electromigration test stations, also in situ in the SEM for direct observation, and with high-resolution resistance measurement |
|
2. Mechanical Testing of Biomaterials
|

|
Microforce tester for measurements of adhesion, friction, and microindentation of biological and non-biological samples |

|
Centrifugal force tester for measurement of friction and adhesion of small-scale living animals |

|
Load cell force transducer coupled with a motorized micromanipulator for measurements of adhesive forces and traction force of living animals |

|
Contact angle measurement device |
|
3. Testing of Structural Alloys
|

|
Creep, high-temperature fatigue and thermomechanical fatigue tests at temperatures up to 1400 °C |

|
Crack growth measurements, also in situ in an SEM |

|
Acoustic emission testing with multichannel recording system for quantitative analysis |

|
Ultrasonic testing: measurement of velocity and attenuation of stress waves with various pulse-echo-overlap and continuous-wave methods |

|
Measurements of dielectric loss and AC and DC electrical conductivity |

|
Mechanical loss measurements in the temperature range 4 to 1400K with a low-frequency forced-vibration apparatus, an inverted torsion pendulum, and a kHz resonant bar apparatus |
|
4. Microstructural Investigations
|

|
Scanning Electron Microscope with an in-situ 4-point bending stage and an electromigration test station for direct observation |

|
Focused Ion Beam Workstation for imaging and machining of small-scale materials |

|
X-ray diffractometer with heating stage and position-sensitive detector, for phase analysis and stress measurements |

|
Four-circle X-ray diffractometer for texture measurements |

|
In situ HVTEM observation of thin films during temperature cycles and under stresses |

|
Bright field and fluorescent microscopy |

|
High-speed videocamera (50-10000 fps) |
|
5. Material Synthesis
|

|
UHV sputter and evaporation systems for thin-film preparation
( thin film laboratory (central scientific facility)
|

|
Electron beam lithography for thin film patterning |

|
Local Deposition and Removal by focused ion beam methods |