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Department Arzt – Research Areas
Nanomechanics of Metals | Thin Film Synthesis | Chemistry
and Patterning of Functional Surfaces |
Evolutionary Biomaterials | Micromechanics of Biological Materials | Adaptive Fiber Structures |
Industrial Materials | Study Program Materials Science
Thin Film Synthesis (Central Scientific Facility)
Our main focus is to achieve well defined films with tailored microstructure. This is done by studying quantitatively nucleation and growth and by tuning the properties of the interface between layer and substrate. Concentrating on thin metallic films (thickness < 5 μm) we use a variety of physical vapour deposition (molecular beam epitaxy (MBE) and magnetron sputtering) methods for layer deposition and surface science techniques for in-situ characterization:
Deposition and characterization facilities
- UHV MBE/magnetron sputtering system, equiped with in-situ RHEED, XPS/AES, AFM/STM
- 2 UHV magnetron sputtering (DC and RC) systems for high quality films
- HV magnetron sputtering (DC and RC) system for standard films
- UHV system for in-situ wafer curvature measurements
- Reactive ion etching system for surface patterning
Recent highlights
- preparation of well defined microstructures (single crystalline and polycrystalline) for fcc metals on various substrates
- development of growth models to quantify film growth
- peparation of well defined bcc films as a starting point for a new research field
- setup of a UHV magnetron sputtering system dedicated for multilayered films
Cooperations
Prof. W. Kaplan, Technion, Israel
Prof. T. Saif, University of Illinois at Urbana-Champaign, Urbana, IL, USA
Dr. T. Chikyo , National Institute for Materials Science, Tsukuba, Japan
Selected recent publications
G. Richter and T. Wagner: Nucleation and growth of Pd clusters on (001) SrTiO3: Determination of diffusion and adsorption energies from cluster densities, Journal of Applied Physics. 98(9) p.94908, (2005)
Q. Fu and T. Wagner: Metal/oxide interfacial reactions: Oxidation of metals on SrTiO3 (100) and TiO2 (110); Journal of Physical Chemistry B. 109(23) p.11697, (2005)
G. Dehm, H. Edongue, T. Wagner, S.H. Oh, and E. Arzt: Obtaining different orientation relationships for Cu films grown on (0001) alpha-Al2O3 substrates by magnetron sputtering. Zeitschrift fur Metallkunde. 96(3) p.249, (2005)
B. Okolo. P. Lamparter, U. Welzel, T. Wagner, and E.J. Mittemeijer: The effect of deposition parameters and substrate surface condition on texture, morphology and stress in magnetron-sputter-deposited Cu thin films. Thin Solid Films. 474(1-2) p.50, (2005)
Q. Fu and T. Wagner: On the tunability of chemical reactions at metal-oxide interfaces. Surface Science. 574(2-3) p.L29, (2005)
Q. Fu and T. Wagner: Determination of growth modes via spectroscopy: new simple analytical models. Applied Surface Science. 240(1-4) p.189, (2005)
Contact
Dr. Gunther Richter
richter@mf.mpg.de
Grain structure of a Fe film deposited on Sapphire (FIB image)
RHEED studies reveal the orientation relationship between Fe layers and Sapphire
Pd islands on a ceramic substrate (STM image)
High resolution TEM of a Pd⁄ZnO(0001) interface fabricated by MBE